mcs100 Yamatake Corporation, mcs100 Datasheet

mcs100

Manufacturer Part Number

mcs100

Description

Air Mass Flow Sensor

Manufacturer

Yamatake Corporation

Datasheet

1.MCS100.pdf (4 pages)

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The MCS100 is a compact, fast response air mass flow

sensor equipped with Yamatake’s original µF (Micro Flow)

sensor chip.

The MCS100 outputs mass flow signal according to the

standard condition (20°C, 1 atm) of the gas flow without

temperature nor pressure compensation.

The MCS100 offers a various flow range, in addition to its

wide rangeability.

The MCS100 is suited for in a variety of flow measurement

such as physics, medical and industry applications.

• Compact and lightweight

• Fast response time

• High accuracy and high repeatability

• Positive/Negative flow measurement due to it’s

• Low power consumption

• Free mounting position and not required straight piping

I Specifications

Flow range

Applicable gas

Response

Output signal

Operating temperature range 0 to 50°C (for both ambient temperature and gas temperature)

Storage temperature

Operating humidity range 10 to 80%RH (no condensation allowed)

Operating pressure range –100 to +200kPa (Range for assured pressure characteristics: –70 to +200kPa)

Pressure resistance

Measurement accuracy

Typical characteristics

of output voltage

Repeatability

Pressure

characteristics

33.5*10.5*17.0mm, just 9g (without cable)

5ms max.

Accuracy: +/–5%FS, Repeatability: +/–2.0%FS

(depending on each model number)

symmetrical structure.

12mA max. at 24Vdc

Model No.

Output voltage 4V (5 to 1V) for full scale

Full scale is to the output voltage 4V under the conditions of 20°C and 1 atm. (101.325kPa abs.)

Under the same temperature and pressure conditions. Output voltage 4V (5 to 1V) for full scale.

Pressure range: –70 to +200kPa

Full scale is to the output voltage 4V under the conditions of 20°C and 1 atm. (101.325kPa abs.).

Volume flow converted to the conditions of 20°C and 1 atm

Air and Nitrogen. Gas must be dry not containing any corrosive components (chlorine, sulfur, acid).

The gas must also be free of any dust or oil mist.

5ms max. (95% response to a step state flow rate changing)

1 to 5Vdc (non-linear characteristics, refer to the standard output characteristics graph),

allowable load resistance 10kΩ or more

–10 to +60°C

300kPa

0.0L/min: 3.00±0.15V

0.5L/min: 3.88±0.15V

1.5L/min: 4.49±0.15V

3.0L/min: 5.00±0.20V

±0.01%FS/kPa

±3.5%FS max.

MCS100A100

–3 to +3L/min

±5%FS max.

Air Mass Flow Sensor

MCS100

0.5L/min: 2.75±0.15V

0.0L/min: 1.00±0.20V

1.5L/min: 3.97±0.24V

3.0L/min: 5.00±0.20V

±0.02%FS/kPa

±7.0%FS max.

MCS100A104

±5%FS max.

0 to 3L/min

• Typical applications

length

– Air Volume Sample

– Gas Analyzers

– Oxygen Concentrators

– Pick and Place detection

0.0L/min: 3.00±0.20V

0.1L/min: 3.77±0.20V

0.3L/min: 4.53±0.20V

0.5L/min: 5.00±0.20V

–0.5 to +0.5L/min

±0.01%FS/kPa

±2.0%FS max.

MCS100A108

±5%FS max.

0.0L/min: 1.00±0.24V

0.1L/min: 2.54±0.24V

0.3L/min: 4.06±0.24V

0.5L/min: 5.00±0.24V

No. CP–SS–1833E

±0.02%FS/kPa

±2.0%FS max.

MCS100A112

0 to 0.5L/min

±6%FS max.

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mcs100 Summary of contents

Page 1

... The MCS100 offers a various flow range, in addition to its wide rangeability. The MCS100 is suited for in a variety of flow measurement such as physics, medical and industry applications. • Compact and lightweight 33.5*10.5*17.0mm, just 9g (without cable) • ...

Page 2

... Note 2: When used at 24Vdc drive, the output change may occur within ±1%FS max. after flowrate stabilization in the vicinity of measure- ment range upper limit flowrate (the amount of drift after 500s from the flowrate stabilization). I Standard flow rate characteristics MCS100A100 [ 3 to 3L/min 5.2 5.0 4.8 4.6 4.4 4.2 4.0 3.8 3.6 3.4 3.2 3.0 2.8 2.6 2.4 2.2 2.0 1.8 1.6 1.4 1.2 1.0 0.8 -3.0 -2.5 -2.0 -1.5 -1.0 -0.5 0.0 0.5 Flow rate (L/min) MCS100A104 [0 to 3L/min] 5.2 5.0 4.8 4.6 4.4 4.2 4.0 3.8 3.6 3.4 3.2 3.0 2.8 2.6 2.4 2.2 2.0 1.8 1.6 1.4 1.2 1.0 0.8 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 ...

Page 3

... Applicable connector: Housing: SHR-03V-S-B made by J.S.T. Mfg Co. Ltd. Contact pin: SSH-003GA-P0.2 made by J.S.T. Mfg Co. Ltd. I Dimensions ± 34 0.5 13.5 13.5 ±0.15 10.5 ±0.2 32.5 33.5 F (Micro Flow) sensor of Yamatake’s original technology MCS100A100 output when outside valve "open" 4.5 4 3.5 3 5ms 2.5 Valve open 2 1.5 1 0.5 0 0.02 0.025 0.03 0 0.005 View from connector 3 terminal side Pin No ...

Page 4

... Specifications are subject to change without notice. Advanced Automation Company 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: http://www.azbil.com RESTRICTIONS ON USE • Control devices for nuclear reactors No part of this publication may be reproduced or duplicated without the prior written permission of Yamatake Corporation. 4 Printed in Japan. (H) 1st Edition: Issued in Apr. 2005 ...

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