mpxh6400a Freescale Semiconductor, Inc, mpxh6400a Datasheet

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mpxh6400a

Manufacturer Part Number
mpxh6400a
Description
High Temperature Accuracy Integrated Silicon Pressure Sensor For Measuring Absolute Pressure, On-chip Signal Conditioned, Temperature Compensated And Calibrated
Manufacturer
Freescale Semiconductor, Inc
Datasheet

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Freescale Semiconductor
Technical Data
© Freescale Semiconductor, Inc., 2007. All rights reserved.
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-chip
integration make the Freescale pressure sensor a logical and economical choice
for the system designer.
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
pressure sensor chip.
Features
Typical Applications
Basic
Element
Ported
Element
Device
Type
The Freescale MPXH6400A series sensor integrates on-chip, bipolar op amp
The MPXH6400A series piezoresistive transducer is a state-of-the-art,
Figure 1
Improved Accuracy at High Temperature
Available in Small and Super Small Outline Packages
1.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Temperature Compensated from –40° to +125°C
Durable Thermoplastic (PPS) Surface Mount Package
Industrial Controls
Engine Control/Manifold Absolute Pressure (MAP)
Absolute,
Element Only
Absolute,
Element Only
Absolute, Axial
Port
Absolute, Axial
Port
shows a block diagram of the internal circuitry integrated on a
Options
ORDERING INFORMATION
1317A MPXH6400AC6U
1317A MPXH6400AC6T1 Tape & Reel MPXH6400A
Case
1317 MPXH6400A6U
1317 MPXH6400A6T1
No.
MPX Series
Order No.
Tape & Reel MPXH6400A
Packing
Options
Rails
Rails
MPXH6400A
MPXH6400A
Marking
Device
1. Pins 1, 5, 6, 7, and 8 are internal device
SUPER SMALL OUTLINE PACKAGES
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
1
2
3
4
20 TO 400 kPA (3.0 TO 58 psi)
MPXH6400A
PRESSURE SENSOR
0.2 TO 4.8 V OUTPUT
MPXH6400A6U/6T1
PIN NUMBERS
V
GND
(3.0 TO 58 psi)
N/C
INTEGRATED
V
SERIES
MPXH6400AC6U/C6T1
OUT
CASE 1317-04
S
CASE 1317A-03
Rev 2, 01/2007
5
6
7
8
MPXH6400A
(1)
N/C
N/C
N/C
N/C

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mpxh6400a Summary of contents

Page 1

... On-Chip Signal Conditioned, Temperature Compensated and Calibrated The Freescale MPXH6400A series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on-chip integration make the Freescale pressure sensor a logical and economical choice for the system designer ...

Page 2

... Storage Temperature Operating Temperature Output Source Current @ Full Scale Output Output Sink Current @ Minimum Pressure Offset 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from V MPXH6400A Thin Film Gain Stage #2 ...

Page 3

... R — — Min Typ Max Unit 20 — 400 kPa 4.64 5.0 5.36 Vdc — 6.0 10 mAdc 0.133 0.2 0.267 Vdc 4.733 4.8 4.866 Vdc 4.467 4.6 4.733 Vdc — — ±1.5 %V — 12.1 — mV/kPa — 1.0 — ms — 20 — ms — ±0.25 — 25°C. FSS MPXH6400A FSS FSS 3 ...

Page 4

... A fluorosilicone gel isolates the die surface and wire bonds Figure 3 from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPXH6400A series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long-term reliability ...

Page 5

... Transfer Function (MPXH6400A) Normal Transfer Value: V OUT ± Pressure Error x Temp. Factor x 0.002421 5.0 ± 0. Temperature Error Band 4.0 3.0 Temperature 2.0 Error Factor 1.0 0.0 -40 NOTE: The Temperature Multiplier is a linear response from 0°C to -40°C and from 85°C to 125°C Pressure Error Band 6 ...

Page 6

... MPXH6400A 6 PACKAGE DIMENSIONS CASE 1317-04 ISSUE F SUPER SMALL OUTLINE PACKAGE PAGE Sensors Freescale Semiconductor ...

Page 7

... Sensors Freescale Semiconductor PACKAGE DIMENSIONS CASE 1317-04 ISSUE F SUPER SMALL OUTLINE PACKAGE PAGE MPXH6400A 7 ...

Page 8

... MPXH6400A 8 PACKAGE DIMENSIONS CASE 1317-04 ISSUE F SUPER SMALL OUTLINE PACKAGE PAGE Sensors Freescale Semiconductor ...

Page 9

... Sensors Freescale Semiconductor PACKAGE DIMENSIONS CASE 1317A-03 ISSUE C SUPER SMALL OUTLINE PACKAGE PAGE MPXH6400A 9 ...

Page 10

... MPXH6400A 10 PACKAGE DIMENSIONS CASE 1317A-03 ISSUE C SUPER SMALL OUTLINE PACKAGE PAGE Sensors Freescale Semiconductor ...

Page 11

... Freescale Semiconductor Literature Distribution Center P.O. Box 5405 Denver, Colorado 80217 1-800-441-2447 or 303-675-2140 Fax: 303-675-2150 LDCForFreescaleSemiconductor@hibbertgroup.com MPXH6400A Rev.2 01/2007 Information in this document is provided solely to enable system and software implementers to use Freescale Semiconductor products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document ...

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