83885 SENSONOR TECHNOLOGIES AS, 83885 Datasheet

83885

Manufacturer Part Number

83885

Description

IC, SENSOR, GYRO, SAR100, 28LCC

Manufacturer

SENSONOR TECHNOLOGIES AS

Datasheet

1.83885.pdf (13 pages)

Specifications of 83885

No. Of Axes

Sensor Case Style

LCC

No. Of Pins

Supply Voltage Range

4.45V To 5.5V

Operating Temperature Range

-40Â°C To +90Â°C

Ic Generic Number

SAR100 - 100

Interface

SPI

Interface Type

SPI

Rohs Compliant

Yes

Lead Free Status / RoHS Status

Lead free / RoHS Compliant

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1 FEATURES

2 GENERAL DESCRIPTION

The SAR100 consists of a ButterflyGyro™ MEMS die and a BiCMOS ASIC housed

in a rigid custom ceramic LCC package to accommodate dual axis surface

mounting. The function is based on the excitation of a reference motion in the

butterfly structure. An angular rotation of the device will generate Coriolis forces,

whose frequency equals that of the reference motion and whose resulting vibration

amplitude is a measure for the angular rotation. By utilizing Sensonor Technologies‟

unique patented sealed cavity technology, the vibrating masses are contained

within the low-pressure hermetic environment needed for creating low dynamic

damping and high Q factors, without any degradation over the lifetime of the device.

The gyro die is built as a triple stack consisting of a bottom glass die with metalized

patterns defining excitation and detection electrodes, a middle micro machined mono crystalline silicon die with the

oscillating masses, which also represent a common opposite electrode, and a third top cap glass die. A time

multiplexed, switched interface is used between the gyro die and the ASIC. This makes it possible to improve the

symmetry by using the same electrodes for drive interface and sense interface. By the symmetric mechanical design

and by connecting the electrodes cross-wise symmetric, the "butterfly” masses are operating in a balanced anti-phase

movement. The balanced operation of both the excitation mode and the detection mode makes SAR100 almost

insensitive to environmental vibratnions, limiting effects causing bias drift as well as improves the Q-factors. A fine-

tuning of the oscillation frequencies, to allow for force-feedback operation, is done during final test for each sensor by

applying and programming an electrostatic bias to reduce the mechanical stiffness and thereby calibrate the detection

mode frequency. Fixed algorithms use individually determined calibration coefficients stored in OTPROM poly fuse

cells. Readings from the internal temperature sensor are used for accurate angular rate definitions. An SPI interface

enables communication between application and SAR100. The angular rate data output is in a 12-bit 2‟s complement

TS1440 rev.4

Figure 2-1: SAR100 block diagram

o Horizontal or vertical mounting

o High reliability and robustness over long lifetime

o Low vibration sensitivity

o High overload and shock capability (5000 g)

o Butterfly balanced design for high mechanical common mode rejection

o Closed-loop force feedback operation with electrostatic frequency tuning

o Low bias drift

o Ideal mono crystalline Si material

o Wafer level sealing with controlled Q-factor

o Low power

o Single supply +5 VDC

o Fully digital with SPI communication and on chip OTP calibration

o Digitally controlled sample rate up to 2000 SPS

o Bandwidth defined by built in 4th order digital LP filter

o Intrinsic continuous diagnostic monitoring

o Temperature sensor

o No external components required

Driver

LNA

Excitation

Detection

control

DATASHEET

sales@sensonor.no

clock generator

Phone: +47 3303 5000 - Fax: +47 3303 5005

Demodulator

control and

shifter 90°

Power up

Phase

Sensonor Technologies AS

References,

decimation

ADC and

bias and

OTPROM

PTAT

1/13

Gain, offset and

compensation

temperature

www.sensonor.com

SPI serial

4th order

interface

LPF

IIR

LOAD

SCLK

MOSI

MISO

SAR100 Single-Axis Gyro

ButterflyGyro

format. A number of functions are

available through the digital SPI

interface.

Figure 1-1: SAR100 element

structure

June 2010

™

Related parts for 83885

83885 Summary of contents

Page 1

... OTPROM temperature compensation LPF ADC and Demodulator 4th order decimation IIR Sensonor Technologies AS Phone: +47 3303 5000 - Fax: +47 3303 5005 sales@sensonor.no www.sensonor.com 1/13 ButterflyGyro SAR100 Single-Axis Gyro Figure 1-1: SAR100 element structure format. A number of functions are available through the digital SPI interface ...

Page 2

TABLE OF CONTECNTS 1 Features ................................................................................................................................................................ - General Description .............................................................................................................................................. - Table of Contecnts ................................................................................................................................................ - Abbreviations and Definitions ............................................................................................................................... - 2 - 4.1 Abbreviations ............................................................................................................................................... - 2 - 4.2 ...

Page 3

RECOMMENDED OPERATING CONDITIONS Characteristics Input range Dynamic overload, angular rate Dynamic overload, shock Recovery time dynamic overload Supply voltage Current consumption Sensor oscillation frequency Internal master clock Operating temperature Note 1: The PRCEN command will have to be issued ...

Page 4

Name Signal Description MOSI Master Out, Slave In. After a negative edge on LOAD, 8-bit command is shifted in on MOSI, clocked by SCLK (MSB first). MISO Master In, Slave Out. Output from previous command is stored in a Data ...

Page 5

LOAD MOSI SCLK MISO Cx: Command bits Figure 7-1: SPI interface signal timing diagram For commands that need an address, the address byte ...

Page 6

Error Code The Error Code is a bit pattern defined as 1000 0000 an illegal or undefined SPI command is attempted executed RARH or RARLX command was executed while at the same time any one or ...

Page 7

Characteristics Temperature sensor Word length Format SPI commands Scale Factor Full scale signal Accuracy Note 1: Calibrated at f =2Hz.  Integrated over Δf = fH. Note 2: Note 3: -3dB frequency. Note 4: LP-filter transfer function: a11 1.91064453125E+00 a21 ...

Page 8

POWER SUPPLY AND START-UP The SAR100 is designed for a single +5 volt supply. The device has four pins for power connection: V and AV . The V (pin 16/T14) and close as possible to the ...

Page 9

Characteristics Supply voltage rise time to VDD-MIN Start-up time Time to rate data within full specifications AVDD for internal RESET Detectable AVDD glitch Reset threshold Status Register AVDD OK flag (PRNG_OK) threshold Reset delay Note 1: The voltage V is ...

Page 10

STATUS REGISTER AND INTERNAL DIAGNOSTIC MONITORING Internally in the SAR100, there are 6 error monitoring functions employed to make sure irregular output angular rate is detected. If any of the monitoring functions detects an irregular condition the corresponding flag ...

Page 11

PACKAGE INFORMATION 11.1 Physical dimensions, material and weight Figure 11-1: SAR100 package dimensions. Top, side and bottom view Notice the direction of positive rotation for SAR100 (indicated in the upper left of the figure). Characteristics Package type Number of ...

Page 12

Pin Configuration Horizontal Vertical Pin Mount Mount Name 1 1 GND 2 2 AVSS REFV T18 13 T17 14 T16 AVDD 15 T15 16 T14 VDD 17 ...

Page 13

... SensoNor Technologies reserves the right to make changes without further notice to any products herein. SensoNor Technologies makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does SensoNor Technologies assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages ...

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