B58600I0000A001 EPCOS AG, B58600I0000A001 Datasheet - Page 5

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B58600I0000A001

Manufacturer Part Number
B58600I0000A001
Description
Pressure Sensors
Manufacturer
EPCOS AG
Datasheet
Preliminary data
Symbols and Terms
1)
2)
3)
4)
5)
6)
7)
8)
9)
10)
11)
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Pressure sensors
C33 series
Maximum power supply V
This is the maximal allowed voltage, which may be applied to the piezoresistive bridge circuit without damage.
Operating temperature range T
This is the operating Temperature range T
conditions like gluing, wire bonding etc, the die has to be tested over the operating temperature range by the customer
fully assembled. For design verification and process control samples, mounted on a TO39 base are tested over a
reduced measuring temperature range of T
Storage temperature range T
If the pressure sensor dies are stored in the temperature range T
will not affect the performance of the pressure sensor dies.
Operating pressure range p
In the operating pressure range 0 to p
Over pressure p
Pressure cycles in the pressure range 0 to p
Burst pressure p
Up to the burst pressure p
tested at room temperature on samples mounted on a TO39 base by increasing the applied pressure until the diaphragm
is destroyed.
Operating power supply V
The pressure sensor parameters are defined for a power supply voltage of V
voltage range V
coefficient of the offset voltage are defined by:
Total bridge resistance R
The total bridge resistance is defined between pad X5 and X2 (see the dimensional drawing in this data sheet) of the
closed piezoresistive bridge circuit. The total bridge resistance is in a good approximation the output impedance of the
piezoresistive bridge circuit. This parameter is tested completely on a wafer (wafer level test measurement).
Temperature coefficients of resistance
The temperature coefficients of resistance are tested for design verification on samples, mounted on a TO39 base
over a reduced temperature range T
The temperature coefficients of first and second order are defined with the polynomial:
The coefficients
Offset voltage V
The offset voltage V
supply V
output characteristic to zero bar.
It should be noted that this parameter may be influenced by the assembly.
Temperature coefficient of offset voltage TCV
The temperature coefficients of offset voltage are defined for a bridge voltage power supply V
These parameters strongly depend on assembly conditions like gluing, wire bonding etc.
The temperature coefficients of offset voltage are tested for design verification on samples, mounted on a TO39 base
over a reduce temperature range, using the temperature T
Assuming the offset voltage is mainly due to induce stress TCV
DD
= 5 V. For design verification V
DD,min
0
OV
Rs
berst
0
and
V
to V
is the output voltage V
0
(
) T
DD,max
Rs
berst
S
DD
DD
are calculated using the three measurement points of R
1
r
the diaphragm of the sensor die will not be destroyed mechanically. This parameter is
st
R
the ratiometric parameters r(V
S
a
(
s
) T
T (
meas
r,max
R
25
S
,
min
T (
C
the pressure sensor die output characteristic is as defined in this specification.
a,min
0
meas,min
)
Rs
is measured on samples, mounted on a TO39 base by extrapolating the
= –20 ° C to T
out
ov
25
and
(p = 0 bar abs) at zero absolute pressure and for a bridge voltage power
do not affect the performance of the pressure sensor dies.
to T
s
r
T (
C
0
V
to T
a,max
)
DD
Rs
25
1
Page 5 of 8
:
meas,max
. Because most of the sensor parameters depend on assembling
C
)
r
meas
Rs
2
5 (
meas
V
T
V [
,
.
o
max
DD
,
(
min
])
25
25
0
) like sensitivity, offset voltage and the temperature
= 80 ° C with T
may be calculated by extrapolating using:
st,min
[ 5
V
= –20 ° C, T
C
DD
C
] V
)
to T
v
1
Rs
T (
st,max
Barometric pressure sensor die
T
25
DD
meas
25
without applied voltage power supply, this
R
= 5 V. In the operating power supply
C
= 25 ° C.
)
,
C
max
v
s
2
2
(T) at T
= 80 ° C and T
T (
25
meas,min
C
DD
)
2
= 5 V.
, T
R
= 25 ° C.
R
and T
meas,max
2009-08-03
.

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