AD5520 Analog Devices, AD5520 Datasheet

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AD5520

Manufacturer Part Number
AD5520
Description
Per Pin Parametric Measurement Unit/Source Measure Unit
Manufacturer
Analog Devices
Datasheet

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REV. A
Information furnished by Analog Devices is believed to be accurate and
reliable. However, no responsibility is assumed by Analog Devices for its
use, nor for any infringements of patents or other rights of third parties that
may result from its use. No license is granted by implication or otherwise
under any patent or patent rights of Analog Devices. Trademarks and
registered trademarks are the property of their respective owners.
FEATURES
Force/Measure Functions
Force/Measure Voltage Range
4 Programmable Force/Measure Current Ranges
Extended Current Ranges
Clamp Circuitry and Window Comparators On Board
Guard Amplifier
64-Lead LQFP Package
APPLICATIONS
Automatic Test Equipment
Instrumentation
Force Voltage/Current, Measure Current/Voltage
Force Current/Voltage, Measure Current/Voltage
Per Pin PMU, Shared Pin PMU, Device Power Supply
Source Measure, Parametric Measurement, Precision
Measurement
4 A,
40 mA and
40 A,
160 mA with External Driver
400 A,
4 mA
11 V
FIN
CLH
CLL
REFGND
MEASIOUT
MEASOUT
MEASVOUT
CPH
CPOH
CPOH
CPL
AD5520
COMPARATOR
CPCK
FUNCTIONAL BLOCK DIAGRAM
Measurement Unit/Source Measure Unit
BW SELECT
DETECT
CLAMP
LOGICS
INST AMP
INST AMP
G = 16
G = 1
V
I
SENSE
SENSE
GENERAL DESCRIPTION
The AD5520 is a single channel per pin parametric measure-
ment unit (PPMU) for use in semiconductor automatic test
equipment. The part is also suited for use as a source
measurement unit for instrumentation applications. It
contains programmable modes to force a pin voltage and
measure the corresponding current or force a current and
measure the voltage. The AD5520 can force/measure over a
± 11 V range or currents up to ± 4 mA with its on-board
force amplifier. An external amplifier is required for wider
current ranges. The device provides a force sense capability to
ensure accuracy at the tester pin. A guard output is also
available to drive the shield of a force/sense pair. The AD5520
is available in a 64-lead LQFP package.
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.
Tel: 781/329-4700
Fax: 781/326-8703
AV
EE
AV
G = 1
CC
GUARDIN
MEASI5H
MEASI4H
MEASI3H
MEASI2H
MEASI1H
MEASI0H
MEASVH
MEASVL
MEASIL
GUARD
© 2003 Analog Devices, Inc. All rights reserved.
AGND
FOH3
FOH2
FOH1
FOH0
QM5
QM4
FOH
Per Pin Parametric
AD5520
www.analog.com

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AD5520 Summary of contents

Page 1

... An external amplifier is required for wider current ranges. The device provides a force sense capability to ensure accuracy at the tester pin. A guard output is also available to drive the shield of a force/sense pair. The AD5520 is available in a 64-lead LQFP package. FUNCTIONAL BLOCK DIAGRAM AD5520 ...

Page 2

... AD5520–SPECIFICATIONS Parameter VOLTAGE FORCE MODE Force Control Output Voltage Range FOH Output Impedance FOH0 FOH1 FOH2 FOH3 Input Offset Error Gain Error 2 Clamp Voltage Error CURRENT MEASURE/FORCE FOH0 FOH1 FOH2 FOH3 CURRENT MEASURE MODE High Sense Input Range, V MEASIxH 3 Linearity ...

Page 3

... 0.5 mA –3– AD5520 Test Conditions/Comments COMPIN2 = 100 pF COMPIN1 = 1000 pF COMPIN0 = 3000 pF V > V CPH CPL Capacitive Load Only 100 pF Capacitive Load V > V CLH CLL All digital inputs together SINK ...

Page 4

... AD5520 TIMING CHARACTERISTICS DV DD Parameter 550 5 t 320 6 t 450 7 t 150 8 t 100 9 t 240 10 t 150 11 t 100 12 t 320 13 NOTES 1 See Figure 1. 2 All input signals are specified with (10 Specifications subject to change without notice ...

Page 5

... ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the human body and test equipment and can discharge without detection. Although the AD5520 features proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance degradation or loss of functionality ...

Page 6

... Logic Input. Used in conjunction with AC0 to select one of three external compensation capacitors. For details, see the Force Control Amplifier section. PIN CONFIGURATION 64-Lead LQFP AD5520 (Not to Scale CONNECT PIN FUNCTION DESCRIPTIONS – ...

Page 7

... Multiplexed DUT Voltage/Current Sense Output. For details, see the Measured Parameter section. 60 MEASIOUT DUT Current Sense Output. 61 MEASVOUT DUT Voltage Sense Output. 62 FIN Force Control Voltage Input. 63 CLH Upper Clamp Voltage Input CLH > CLL. 64 CLL Lower Clamp Voltage CLL < CLH. REV. A PIN FUNCTION DESCRIPTIONS (continued) –7– AD5520 ...

Page 8

... AD5520–Typical Performance Characteristics 0.0030 0.0025 0.0020 0.0015 0.0010 0.0005 TEMPERATURE ( C) TPC 1. Voltage Sense Amplifier Linearity vs. Temperature 100 1k FREQUENCY (Hz) TPC 2. Voltage Sense Amplifier CMRR vs. Frequency 10 0 –10 – 1.0nF COMP –30 –40 C COMP ...

Page 9

... TPC 10. Force Amplifier Bandwidth–MODE –10 –20 –30 1M 10M 100M 100 0 –5 –10 –15 –20 –25 –30 10M 100k –9– AD5520 V = +15V –15V 0.1nF COMP C = 1.0nF COMP C = 3.3nF COMP 1k 10k FREQUENCY (Hz) I SENSE ...

Page 10

... AD5520 +15V –15V –10 –20 –30 –40 –50 –60 100k 1M FREQUENCY (Hz) TPC 13. Voltage Sense Amplifier AC PSRR 700 600 GUARD 500 400 300 V SENSE 200 FOH 100 I SENSE 0 10 100 1k FREQUENCY (Hz) TPC 14. Noise Spectral Density ...

Page 11

... PMU—which measure mode it is in, which com- pensation capacitor is used, and the selected current range. Standby Mode The AD5520 may be placed into standby mode via the standby logic input. In this mode, the force amplifier is disconnected from the force input (FIN), the switch in series with the force output pins, FOHx, is opened, and the current measure amplifier is dis- connected from the sense resistors ...

Page 12

... High High Standby (same as STANDBY = High) R Selection S The AD5520 is designed so that the voltage drop across each of resistors will be less than ±500 mV when maximum current the flowing through them. To support other current ranges, these sense resistor values may be changed. A force amplifier can drive a maximum ...

Page 13

... In this case, voltage at the DUT is sensed across the voltage measure amplifier (Gain = 1) and presented at the MEASVOUT output. V FIN V CLH VFIN Figure 6. Current Force, Voltage Measure Mode –13– AD5520 FIN CLH CLL VCLL VCLH REFGNDI/V V VMEASVOUT ...

Page 14

... PMU are the major contributors to this time. Figure 8 shows a simplified block diagram of the AD5520 PMU. In brief, the device consists of a force control amplifier, access to a number of selectable sense resistors, a voltage measure instrumentation amplifier, and a current measure instrumentation amplifier ...

Page 15

... CPH CPOH CPOH CPL CPCK Figure 8. Typical Configuration of the AD5520 as Used in an ATE Circuit REV. A required, an external amplifier must be used with relays to switch in the different current ranges to the DUT. Other components are also required to make the PMU function. The PMU requires ...

Page 16

... AD5520 TYPICAL APPLICATION CIRCUIT Figure 9 shows the AD5520 as it would be used in an ATE system. This device could be used as a per pin parametric unit in order to speed up the rate at which testing could be done. It could also be used as a DUT power supply, as shown in the application circuit. The central PMU shown in the block diagram is usually a highly accurate PMU and is shared among a number of pins in the tester ...

Page 17

... D[0:7] REV. A RL2 RELAY–G6H RL1 RELAY–G6H Figure 10. Evaluation Board Schematic –17– AD5520 R7 R6 12.4 R5, 124 R4, 1.24k R3, 12.4k R2, 124k R1, ...

Page 18

... AD5520 10 1. 1.40 1.35 0.15 SEATING 0.05 PLANE VIEW A ROTATED 90 CCW OUTLINE DIMENSIONS 64-Lead Low Profile Quad Flat Package [LQFP] (ST-64-2) Dimensions shown in millimeters 0.75 0.60 1.60 MAX 0. SEATING PIN 1 PLANE 0.20 0.09 VIEW 0.08 MAX COPLANARITY 0.50 BSC COMPLIANT TO JEDEC STANDARDS MS-026BCD –18– 12.00 BSC 10.00 TOP VIEW (PINS DOWN) ...

Page 19

... Revision History Location 10/03—Data Sheet changed from REV REV. A. Changes to SPECIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Updated ORDERING GUIDE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 REV. A –19– AD5520 Page ...

Page 20

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