fdum200db Sensortechnics GmbH, fdum200db Datasheet - Page 5

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fdum200db

Manufacturer Part Number
fdum200db
Description
Mass Flow Sensors Gases
Manufacturer
Sensortechnics GmbH
Datasheet
OUTLINE DRAWING
mass: approx. 5.6 g
GAS CORRECTION FACTORS
Notes:
9
10
11
E / 11720 / A
Gas correction factors are referenced to nitrogen (N
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
When sensing Hydrogen (H
Hydrogen typ. 12 V, Helium typ. 15 V
Hydrogen (H
hydrogen flow and are designated with an "H" at the end of the order number.
(2x Ø0.19)
2x Ø 4.70
2
) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
G
H
H
A
N
O
A
N
C
M
A
N
N
C
e
d y
g r
t i
r i
r t i
m
t i
t i
a
x
a
a
e
o r
g y
o r
o r
u i l
s
b r
b r
h t
c i
m
o
o r
g
s u
g
n
a
y t
m
e
o
o
o
g
o
e
e
n
n
n
n
n
A (
p
e
x
n
e
n
H (
o
a i
(
d i
m
d
e
n
O
) r
x
N (
d
(8x0.01)
C (
o i
) e
8x0.25
e
o
d i
H (
N (
o i
2
2
)
n
x
2
) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
(0.67)
H
17.02
e
N (
)
(0.05)
x
d i
o
2
H
(0.41)
10.41
1.14
)
4
d i
x
N (
)
3
e
O
d i
)
e
)
2
C (
e
O
N (
27.94
(1.10)
C (
)
O
O
2
O
)
2
)
)
32.39
(1.28)
9
(0.515)
13.08
2
) as calibration gas type. Approximate gas correction factors are provided
8x3.05
(0.12)
7x2.54
(0.10)
(0.62)
(0.52)
(0.76)
(1.20)
15.75
13.21
30.48
19.3
C
Mass flow sensors for gases
r o
e r
t c
8x0.51
o i
1
1
1
1
1
1
1
1
1
1
0
0
0
(0.02)
0 .
0 .
0 .
0 .
0 .
1 .
1 .
3 .
3 .
3 .
5 .
7 .
9 .
n
5
5
5
(0.04)
1
1
5
1.02
a f
0
0
1 ,
www.sensortechnics.com
1
t c
(0.11)
2.79
r o
(0.50)
a (
12.57
(2x Ø 0.05)
(Ø 0.15)
2x Ø 1.17
Ø 3.81
p
p
o r
dimensions in mm (inches)
FDU Series
x
) .
third angle projection
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