S7170-0909_11 HAMAMATSU [Hamamatsu Corporation], S7170-0909_11 Datasheet

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S7170-0909_11

Manufacturer Part Number
S7170-0909_11
Description
Manufacturer
HAMAMATSU [Hamamatsu Corporation]
Datasheet
Note: Two-stage TE-cooled type (S7172-0909) is also available.
*1: Window-less type (ex. S7170-0909N) is available upon request.
Pixel size
Vertical clock phase
Horizontal clock phase
Output circuit
Package
Window
Features
512 × 512 pixel format
Greater than 90% quantum efficiency at peak sensitivity
wavelength
Wide spectrum range
Low readout noise
Wide dynamic range
MPP operation
Non-cooled type: S7170-0909
One-stage TE-cooled type: S7171-0909-01
Selection guide
Structure
S7171-0909-01
(Temporary window is xed by tape to protect the CCD chip and wire bonding.)
HAMAMATSU developed MPP (multi-pinned phase) mode back-thinned FFT-CCDs S7170-0909, S7171-0909-01 speci cally
designed for low-light-level detection in scienti c applications. The S7170-0909, S7171-0909-01 have sensitivity from the
UV to near-IR as well as having low dark current and wide dynamic range. Stability of the spectral response curve is also
achieved for high precision measurements.
Either one-stage or two-stage thermoelectric cooler is built into the package (S7171-0909-01, S7172-0909). At room tem-
perature operation, the device can be cooled down to -10 °C by one-stage cooler and -30 °C by two-stage cooler, respec-
tively. In addition since both the CCD chip and the thermoelectric cooler are hermetically sealed, no dry air is required, thus
allowing easy handling.
S7170-0909
Type no.
Parameter
One-stage TE-cooled
Non-cooled
Cooling
Number of total pixels
512 × 512 pixels, back-thinned FFT-CCD
www.hamamatsu.com
532 × 520
CCD area image sensors
S7170-0909
Sapphire*
24-pin ceramic DIP (refer to dimensional outlines)
S7170-0909 S7171-0909-01
Number of effective
1
One-stage MOSFET source follower
Applications
512 × 512
Scienti c measuring instrument
Semiconductor inspection
UV imaging
Bio-photon observation
pixels
24 (H) × 24 (V) m
2 phases
2 phases
[mm (H) × mm (V)]
12.288 × 12.288
Image size
AR-coated sapphire
S7171-0909-01
Suitable multichannel
detector head
C7180
C7181
1

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S7170-0909_11 Summary of contents

Page 1

... HAMAMATSU developed MPP (multi-pinned phase) mode back-thinned FFT-CCDs S7170-0909, S7171-0909-01 speci cally designed for low-light-level detection in scienti c applications. The S7170-0909, S7171-0909-01 have sensitivity from the UV to near-IR as well as having low dark current and wide dynamic range. Stability of the spectral response curve is also achieved for high precision measurements ...

Page 2

... Output gate voltage Reset gate voltage Transfer gate voltage Vertical shift register clock voltage Horizontal shift register clock voltage *2: Package temperature (S7170-0909), chip temperature (S7171-0909-01) Operating conditions (MPP mode, Ta=25 °C) Parameter Output transistor drain voltage Reset drain voltage Output gate voltage ...

Page 3

... Spectral response (without window)* 100 Front-illuminated CCD (UV coated) 20 Front-illuminated CCD 10 0 200 400 Wavelength (nm) *13: Spectral response is decreased according to the spectral transmittance characteristic of window material. S7170-0909, S7171-0909-01 Symbol Min. Vsat - 240 Fw 300 37500 DR 30000 PRNU - ...

Page 4

... Wavelength (nm) Window material Type no. Window material S7170-0909 Sapphire* S7172-0909 (option: windowless) (two-stage TE- cooled type) AR-coated sapphire* S7171-0909-01 (option: windowless) *14: Hermetic sealing S7170-0909, S7171-0909-01 (Typ. Ta=25 °C) AR-coated sapphire KMPDB0102EB Dark current vs. temperature 1000 14 100 14 10 0.1 0.01 1 -50 -40 ...

Page 5

... CCD area image sensors Device structure (conceptual drawing of top view blank pixels 8-bevel S7170-0909, S7171-0909-01 Thinning V=512 10 H=512 8 9 512 signal out 4 blank pixels 4-bevel KMPDC0075EA 5 ...

Page 6

... Rise and fall times Duty ratio Pulse width RG Rise and fall times TG - P1H Overlap time *15: Symmetrical clock pulses should be overlapped at 50% of maximum amplitude. S7170-0909, S7171-0909-01 Area scanning (large full well mode) Readout period (shutter has to be closed Enlarged view Tpwh, Tpws Tpwr ...

Page 7

... CCD area image sensors Dimensional outlines (unit: mm) 1st pin indication pad S7170-0909, S7171-0909-01 S7170-0909 Window 14.8* Photosensitive area 12.288 2.54 ± 0.13 34.0 ± 0.34 Photosensitive surface (24 ×) 0.5 ± 0.05 * Size of window that guarantees the transmittance in the “Spectral transmittance characteristic of window material” graph 12 KMPDA0084EC 7 ...

Page 8

... Window 19.1 ± 0.13 16 ± 0.13* Photosensitive area 12.288 pin indication pad 2.54 ± 0.13 27.94 ± 0.13 S7170-0909, S7171-0909-01 S7171-0909-01 0.6 ± 0.1 13 Photosensitive surface TE-cooler 12 19 ± 0.4 * Size of window that guarantees the transmittance in the “Spectral transmittance characteristic of window material” graph. Values in parentheses indicate reference value. ...

Page 9

... Temperature of the cooling side of thermoelectric cooler *19: Temperature of the heat radiating side of thermoelectric cooler *20: This is a theoretical heat absorption level that offsets the temperature difference in the thermoelectric cooler when the maximum current is supplied to the unit. S7170-0909, S7171-0909-01 S7171-0909-01 Symbol RD Reset drain ...

Page 10

... resistance at absolute temperature T2 [ constant [K] T1/T2 The characteristics of the thermistor used are as follows. R =10 k 298 B =3450 K 298/323 1 MΩ 100 kΩ 10 kΩ 220 240 260 Temperature (K) S7170-0909, S7171-0909-01 (Typ. Ta=25 ° -10 -20 -30 1.5 2.0 KMPDB0180EA (Typ. Ta=25 °C) 280 300 KMPDB0111EA 10 ...

Page 11

... When using an external cooler, the element cooling/heating temperature gradient rate should be set at less than 5 K/min. Features Designed for back-thinned CCD area image sensor C7180: for non-cooled type (S7170-0909) C7181: for TE-cooled type (S7171-0909-01) Choice of line binning operation/area scanning operation Built-in driver circuit Highly stable temperature controller (C7181) Cooling temperature: fixed at Ts=-10 ± ...

Page 12

... United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1 int. 6, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 S7170-0909, S7171-0909-01 Multichannel detector head controller C7557-01 Shutter timing pulse* AC cable (100 to 240 V ...

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