EM1NR SENSIRION, EM1NR Datasheet - Page 4

• Manufacturer Part Number: EM1NR
• Description: Flow Sensor
• Manufacturer: SENSIRION

Specifications of EM1NR

• Pressure Max: 116psi
• Accuracy: ± 3% At 1-100% Full Scale
• Flow Range: 0-20 Ln/min
• Sensing Accuracy: 3%
• Output Type: RS 232/SPI
• Supply Voltage Max: 18VDC
• Flow Rate Min: 0l/min
• Pressure Drop: 0.29psi
• Supply Voltage Min: 7VDC
• Sensor Output: RS-232/SPI
• Rohs Compliant: Yes
• Flow Rate Max: 20l/min
• Accuracy %: 3%
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

CMOSens
Table 3: Additional Specifications of EM1 Mass Flow Meter – all flow ranges.
Table 4: CMOSens
1
www.sensirion.com
12.0 bar / 174 psi for short time operation, higher values for volume applications on request
Specification
Temperature Sensor (measured media)
Dynamic Range
Resolution
Accuracy
Electrical
Output
Supply Voltage
Electrical Connector
Mechanical
Length
Width
Height
Weight (straight / angle connector)
Mechanical Connector
Maximum Operating Pressure
Burst Pressure
Leak-Integrity
Material
Wetted Materials
RoHS / WEEE compliance
Flow Level
Flow Level
Mass Flow Integration Time
®
EM1 Mass Flow Meter for Gases
200 ln/min
< 5 ln/min
50 ln/min
®
EM1 Mass Flow Meter Resolution (EM1_V) at different Flow Levels and integration time.
1
Condition
Data Sheet EM1 – v3.0 /March 2009
Frequency
1.0 ln/min
4.0 ln/min
Readout
13 ln/min
200 Hz
5 ms
Si, Si
3
N
4
0.25 ln/min
, SiOx, Gold, Viton
Frequency
3.5 ln/min
1.0 ln/min
Readout
20 ms
50 Hz
0 – 60 / 32 – 140
Polycarbonate
13.6 / 5.35
+ 7 – + 18
1 x 10 e-4
4.4 / 1.73
8.18 / 3.2
165 / 105
40 / 580
Value
RS 232
8 / 116
Molex
G 3/8
Yes.
0.1
2
®
, Epoxy, Glob Top,
0.06 ln/min
Frequency
0.9 ln/min
0.3 ln/min
12.5 Hz
Readout
80 ms
0.0143 ln/min
0.11 ln/min
0.03 ln/min
Frequency
1.56 Hz
Readout
640 ms
mbar l/s He
Unit
cm / inch
cm / inch
cm / inch
bar / psi
bar / psi
°C / °F
VDC
inch
K
K
g
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