EM1NV SENSIRION, EM1NV Datasheet - Page 3

• Manufacturer Part Number: EM1NV
• Description: Flow Sensor
• Manufacturer: SENSIRION

Specifications of EM1NV

• Pressure Max: 116psi
• Accuracy: ± 3% At 1-100% Full Scale
• Flow Range: 0-200 Ln/min
• Sensing Accuracy: 5%
• Output Type: RS 232/SPI
• Supply Voltage Max: 18VDC
• Flow Rate Min: 0l/min
• Pressure Drop: 0.029psi
• Supply Voltage Min: 7VDC
• Sensor Output: RS-232/SPI
• Rohs Compliant: Yes
• Flow Rate Max: 200l/min
• Accuracy %: 3%
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

CMOSens
1
Table 1: Specifications of EM1 Mass Flow Meter – low flow ranges.
All data unless otherwise noted apply for calib. cond: 20°C, N2, 1013 mbar absolute pressure, horizontal mounting position, straight inlet fitting (length min. 5 x ∅)
Table 2: Specifications of EM1 Mass Flow Meter – medium and high flow ranges.
All data unless otherwise noted apply for calib. cond.: 20°C, N2, 1013 mbar absolute pressure, horizontal mounting position, straight inlet fitting (length min. 5 x ∅)
1
2
3
4
5
6
7
8
9
10
11
12
13
14
www.sensirion.com
Other ranges for volume applications on request
Including Offset, Non-Linearity, Hysteresis
Better accuracy available on request
In % of full scale (FS)
In % of measured value (m.v.) = of rate = of reading
Other gases for volume applications on request
All data for 1’013 mbar, 1 bar = 100 000 Pa = 401.9 inch H
Other ranges for volume applications on request
Including Offset, Non-Linearity, Hysteresis
Specification
Model Number
Flow Range
Performance
Accuracy
Repeatability
Offset
Standard Calibration Gas
Dynamic Range
Operating Temperature Ambient/Gas
Temp. Coeff. Zero
Temp. Coeff. Span
Position Sensitivity correction
Pressure Coefficient
Pressure Drop at Full Flow
Specification
Model Number
Flow Range
Performance
Accuracy
Repeatability
Offset
Standard Calibration Gas
Dynamic Range
Operating Temperature Ambient/Gas
Temp. Coeff. Zero
Temp. Coeff. Span
Position Sensitivity correction
Pressure Coefficient
Pressure Drop at Full Flow
Better accuracy available on request
In % of full scale (FS)
In % of measured value (m.v.) = of rate = of reading
Other gases for volume applications on request
All data for 1’013 mbar, 1 bar = 100 000 Pa = 401.9 inch H
CMOSens
2,3
9,10
®
EM1 Mass Flow Meter for Gases
1
8
®
EM1 Mass Flow Meter Performance
6
13
7
14
2.5 - 100% FS
2.5 - 100% FS
1 - 100% FS
10 - 100% FS
10 - 100% FS
Condition
Condition
10-100% FS
straight inlet
straight inlet
<2.5 % FS
<2.5 % FS
<10 % FS
<10 % FS
<10% FS
<1 % FS
<5% FS
<5% FS
2
O = 14.5 psi. Lower pressure drop available for volume applications on request.
2
O = 14.5 psi. Lower pressure drop available for volume applications on request.
Data Sheet EM1 – v3.0 /March 2009
11
4
EM1_H…
<2 / 0.029
EM1_R…
20 / 0.29
0-0.05
0 – 20
< 0.03
0.05
<0.5
0.03
0.02
5.0
0.5
0.5
0.3
3
0.15% / bar – 0.01 % / psi
0.15% / bar – 0.01 % / psi
0 – 50 / 32 – 122
0 – 50 / 32 – 122
>= 1:100
>= 1:100
Value
Value
0.01
0.01
0.1
0.1
0.1
0.1
Air
N
2
100 / 1.45
EM1_V…
EM1_L…
2 / 0.029
0 – 200
0 – 0.5
< 0.03
0.075
< 0.1
0.02
0.05
0.02
3.0
0.3
0.5
5
% m.v. / °C
% m.v. / °C
Unit
Unit
mbar / psi
mbar / psi
%FS / °C
%FS / °C
% m.v.
% m.v.
°C / °F
°C / °F
% m.v.
% m.v.
% m.v.
% m.v.
% FS.
l
% FS
% FS
% FS
% FS
% FS
l
% FS
% FS
% FS
% FS
n
n
/min
/min
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12
5