F3M-S825-1 Omron, F3M-S825-1 Datasheet

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F3M-S825-1

Manufacturer Part Number
F3M-S825-1
Description
Sensor Hardware & Accessories Comb Sensor 25 SLOT 8 SPECIAL
Manufacturer
Omron
Datasheet

Specifications of F3M-S825-1

Output Type
*
Sensor Type
*
Lead Free Status / Rohs Status
Lead free / RoHS Compliant
Allows Simultaneous Mapping of Up
to 25 Silicon Wafers
H
H
H
H
Ordering Information
Application Examples
Detects Transparent Glass Wafers
With a Transparency of 92%
The F3M-S825-1 allows the mapping of cassettes that have both
silicon wafers and glass wafers.
Automatic Teaching Saves Setting Time
(Remote Teaching Available)
The F3M-S825-1 has an automatic teaching function that ensures
easy adjustments in minimal time. The remote teaching function
allows quick, on-the-fly set up.
Applicable wafer size
8 inches (6.35-mm pitch)
Silicon Wafer Mapping Sensor
Economical—one sensor detects most
wafer types
200 mm wafer size
Automatic and remote teaching
capability
Self-diagnostic functions reduce
downtime
Number of cassette slots
25
R
Function
Self-diagnosis
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Static Electricity Protection
OMRON’s optical system (including emitter and receiver)
prevents malfunction and damage—protecting the Sensor from
static electricity if charged on the semiconductor wafers at the
time of mapping.
Remarks
CE marking
Part number
F3M-S825-1
F3M-S825-1

Related parts for F3M-S825-1

F3M-S825-1 Summary of contents

Page 1

... Application Examples Detects Transparent Glass Wafers With a Transparency of 92% The F3M-S825-1 allows the mapping of cassettes that have both silicon wafers and glass wafers. Automatic Teaching Saves Setting Time (Remote Teaching Available) The F3M-S825-1 has an automatic teaching function that ensures easy adjustments in minimal time ...

Page 2

... Static electrical noise: No malfunction or destruction Hz, 0.5 mm double amplitude for 2 hrs each and Z axes 2 300 m/s (30G) 3 times each and Z axes IEC60529 IP40 Pre-wired cable (length: 500 mm 35 mm) IDC connector (insulation displacement) Approx. 110 g (3.8 oz) Polycarbonate ABS Vinyl-insulated, bending type Spacer and instruction manual F3M-S825-1 ...

Page 3

... Power indicator Warning indicator RUN/TEACH mode selector Teaching indicator Teaching button The remote or manual automatic teaching of the F3M-S825-1 is possible with the following two sensitivity settings: 1. Max. Sensitivity Setting: Detects semiconductor silicon wafers, and SIC wafers. 2. Teaching with No Target Object: Detects transparent wafers. ...

Page 4

... Do not wire power lines or high-voltage lines within the same conduit with the lines of the F3M-S825-1, or the sensor may be damaged or malfunction. Avoid mechanical impact when mounting the F3M-S825-1, or its water-resistant properties will be reduced. J POWER SUPPLY ...

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