B58601D8010A024 EPCOS AG, B58601D8010A024 Datasheet - Page 2

• Manufacturer Part Number: B58601D8010A024
• Description: Pressure Sensors
• Manufacturer: EPCOS AG

Applications
Features
Options
Delivery mode
Dimensional drawings
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Pressure sensors
C28 series
Medical devices
Automotive
Automation
Piezoresistive MEMS technology
Small dimensions: 2.05 × 2.05 mm
Square diaphragm
Measured media (front side):
Dry non-aggressive gases.
Unsuitable for substances which react with
glass, silicon or aluminum.
Whetstone bridge with mV output,
ratiometric to supply voltage
Rated pressure ranges 1.6 up to 40 bar
Temperature sensing diode
Tray
checked bond area (typ. 100µm x 100µm)
X5
X8
X9
X5
X1
840
700
560
560
280
2050
X2
280
560
560
850
X4
Gauge pressure sensor die for front side pressure applications
X3
X10
X4
all dimensions in µm
Page 2 of 8
Note1
Note1: geometry of diaphragm depend
on specification
Si 100
390
800
glass
BOROFLOAT
TM
X4
electrical diagram:
allowable edge disruptions
80 µm max.
R1
R3
X3
X5
R2
X2
R4
allowable edge disruptions
X9
X8
X1
A
X1 :
X2 :
X3 :
X4 :
X5 :
X8 :
X9 :
X10: Substrate
50 µm max.
p
150 A B
Vout+
VDD–
VDD–
Vout–
VDD+
Diode (N)
Diode (P)
2009-08-03
B