sm5470 Servoflo Corporation, sm5470 Datasheet - Page 5

• Manufacturer Part Number: sm5470
• Description: Low Cost Packaged Pressure Sensors
• Manufacturer: Servoflo Corporation

SM5430/SM5470
Low Cost Packaged Pressure Sensors
NOTICE
Information in this document is provided solely to enable software and system implementers to use Silicon
Microstructures, Inc. products and/or services. No express or implied copyright licenses are granted hereunder to design
or fabricate any silicon-based microstructures based on the information in this document.
Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products for
any particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or use of
any product or silicon-based microstructure, and specifically disclaims any and all liability, including without limitation
consequential or incidental damages. Parameters that may be provided in Silicon Microstructures, Inc. data sheets and/or
specifications can and do vary in different applications and actual performance may vary over time.
Silicon
Microstructures, Inc. assumes no responsibility for any inaccuracies and/or errors in this publication.
All operating
parameters, must be validated for each customer application by customer’s technical experts. Silicon Microstructures,
Inc. does not convey any license under its patent rights nor the rights of others. Silicon Microstructures, Inc. makes no
representation that the circuits are free of patent infringement. Silicon Microstructures, Inc. products are not designed,
intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications
intended to support or sustain life, or for any other application in which the failure of the Silicon Microstructures, Inc.
product could create a situation where personal injury or death may occur. Should Buyer purchase or use Silicon
Microstructures products for any such unintended or unauthorized application, Buyer shall indemnify and hold Silicon
Microstructures, Inc. and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs,
damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or
death associated with such unintended or unauthorized use, even if such claim alleges that Silicon Microstructures, Inc.
was negligent regarding the design or manufacture of the part. Silicon Microstructures, Inc. reserves the right to make
changes without further notice to any products herein
TM
Silicon Microstructures, Inc.
and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc. All
other service or product names are the property of their respective owners.
© Silicon Microstructures, Inc. 2001-2008. All rights reserved.
Rev 1.4 6_07
40SP5012.00
03_08
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ www.si-micro.com