sm5872 Servoflo Corporation, sm5872 Datasheet - Page 3

• Manufacturer Part Number: sm5872
• Description: Sm5822/sm5872 Co-integrated Pressure Sensor
• Manufacturer: Servoflo Corporation

40SP5002.03
CHARACTERISTICS FOR SM5822/SM5872 – SPECIFICATIONS
All parameters are measured at room temperature while applying 5.000V supply, unless otherwise specified.
Zero output (absolute and gauge)
Zero output (differential)
Output span
Total Error
Response time
Supply voltage
Current consumption
Overpressure (burst pressure)
Operating temperature range
Compensated temperature range
Storage temperature range
Media compatibility
Notes:
1.
2.
3.
4.
5.
6.
7.
8.
9.
10. Maximum pressure on package is 150 PSI
11. Total error is defined as departure from ideal response at all temperatures and pressures as a percentage of full scale.
12_08
Absolute parts are only offered in the SM5822 Series.
Single-ended parts (Pressure Type - S) have 2 ports and are for higher gain differential applications where the
differential pressure is always positive.
For the 5822 series this applies for positive pressure only.
Sensor output is ratiometric to supply.
Full-scale (FS) is defined as zero pressure to rated pressure; differential parts can be used ±FS. Absolute and Gauge
zero output is 0.5 V typical and full-scale output is 4.5 V. Span is the difference between Full-scale output and zero
output, (4 V). For Differential parts, the negative full-scale is typically at 0.5 V, zero is typically 2.5 V, and positive full-
scale is 4.5 volts to give a span of ±2.0 V.
Or 150 PSI, whichever is less. Output amplifier will saturate at about 0.25 V for applied pressure below the rated Zero
and at about 4.75 V for applied pressure above the rated Full-scale.
A 100 nF filter capacitor must be placed between Vsupply and Ground.
Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, Kovar™, epoxy, RTV,
gold, aluminum, Ultem™ plastic, Duraplast™ plastic.
Tested on a sample basis
This includes temperature error and pressure non-linearity error.
Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ www.si-micro.com
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
3.43 mm
Absolute
0.42
3.92
4.75
MIN
+15
-40
-40
2
Co-Integrated Pressure Sensor
1
, Gage & Single
TYP
0.50
4.00
5.00
>5X
+25
+25
+25
MAX
+125
+150
0.58
4.08
5.25
+75
10
1
2
2.42
1.96
4.75
MIN
+15
-40
-40
2
Differential
SM5822/SM5872
TYP
2.50
2.00
5.00
>5X
+25
+25
+25
3
+150
MAX
+125
2.58
2.04
5.25
+75
10
1
UNITS
msec
V FS
%FS
%FS
mA
° C
° C
° C
V
V
V
NOTES
6, 9, 10
4, 5
4, 7
8, 9
11
4
4
9
9
9
9