XA1E-BV413-RH-EMO IDEC, XA1E-BV413-RH-EMO Datasheet - Page 3

• Manufacturer Part Number: XA1E-BV413-RH-EMO
• Description: SWITCH, EMERGENCY STOP, 3NC/1NO, 250VAC
• Manufacturer: IDEC

Specifications of XA1E-BV413-RH-EMO

• Contact Configuration: 4PST-3NC / 1NO
• Switch Operation: Pushlock Turn Reset
• Contact Voltage Ac Nom: 250V
• Contact Voltage Dc Nom: 250V
• Contact Current Max: 3A
• Actuator Style: Mushroom
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

SEMI S2-compliant Combinations
Note: Numbers in the circle refer to the pictures of the corresponding control units shown above.
About SEMI
SEMI is an international industry association whose member companies produce materials, equipment, and related technology for
manufacturing semiconductor, flat panel display (FPD), and micro-electromechanical systems (MEMS) products. The SEMI safety
guideline was published for the semiconductor industry and it is observed with the same importance as standards.
SEMI S2-0706, 12.1 describes as follows; “The equipment should have an ‘emergency off’ (EMO) circuit. The EMO actuator (e.g.,
button), when activated, should place the equipment into a safe shutdown condition, without generating any additional hazard to per-
sonnel or the facility.” Because the semiconductor environment involves solvents and chemicals in many cases, some of which are
toxic, interrupting the power source may cause secondary accidents. SEMI safety guideline requires the installation of an emergency
off switch which disconnects only the part responsible for the hazardous situation, and maintains the functions of safety-related
devices (e.g., smoke detectors, gas/water leak detectors, pressure measurement devices, etc.).
Emergency off buttons should be located or guarded to minimize accidental activation (SEMI S2-0706, 12.5.1). The emergency off
button should be red and mushroom shaped. A yellow background for the EMO should be provided (SEMI S2-0706, 12.3).
XA9Z-KG1
The combination of IDEC’s EMO switch guards and emergency stop switches are approved
by TÜV Rheinland for compliance with SEMI S2 standards.
SEMI S2 Compliant Switches / Switch Guards
2
EMO Switch Guard
• Location of EMO switches on semiconductor manufacturing equipment
• No operation or regularly scheduled maintenance location should require
Acceptance criteria: controls should not be located above 1638 mm (64.5 in.) or
below 838 mm (33 in.) (SEMI S8-0705, 9.1.2).
more than 3 m (10 feet) travel to an EMO button (S2-0706, 12.5.2).
EMO button
HW9Z-KG3
HW9Z-KG4
XA9Z-KG1
1
XA9Z-KG1
XA Series
+
3
(3 m maximum)
10
15
1
4
: XA1E-BV4 ∗∗∗∗ -EMO;
: XW1E-BV4 ∗∗∗∗ -EMO;
: XW1E-BV4 ∗∗∗∗ -EMO;
: HW1E-BV4, HW1B-LV4;
HW9Z-KG3
Operator
7
4
HW9Z-KG3
XW Series
(3 m maximum)
+
2
11
5
8
: XA1E-BV3, XA1E-LV3;
16
: XW1E-BV4, XW1E-LV4, XW1E-TV4;
: XW1E-BV4, XW1E-LV4, XW1E-TV4;
: HW1B-X4;
5
EMO button
17
Applicable Emergency Stop Switches
: HW1B-Y2
9
HW9Z-KG4
XW Series
6
3
: XA1E-BV4, XA1E-LV4
+
HW9Z-KG4
14
6
12
: HW1B-V3;
10
: XW1E-BV5;
15
7
: HW1B-V4;
1638 mm
maximum
13
: HW1B-V3;
11
838 mm
minimum
16
8
: HW1B-X4;
14
: HW1B-V4;
12
The combination of EMO
switch and switch guard
can be used with the FB
series control boxes.
For details, see the FB
series control box catalog
(EP1132).
17
9
: HW1B-Y2
13
3