ASF1400 SENSIRION, ASF1400 Datasheet - Page 3

• Manufacturer Part Number: ASF1400
• Description: SENSOR, MASS FLOW
• Manufacturer: SENSIRION

Specifications of ASF1400

• Pressure Max: 120Pa
• Supply Voltage Range Dc: 7V To 18V
• Accuracy: ± 1%
• Air Mass Flow Range: -400sccm To 400sccm
• Svhc: No SVHC (15-Dec-2010)
• Connection Size: 5mm
• Measuring Range: .015 To 400 Sscm
• Supply Voltage Dc: RoHS Compliant
• Response Time: 142ms
• Rohs Compliant: Yes

ASF1400 Bidirectional Mass Flow Meter
1
Table 1: Overview of ASF1400 Gas Sensor Performance
1
2
3
4
5
6
7
8
9
10
www.sensirion.com
All data apply for calibration conditions (20°C, 1013 mbar) unless otherwise noted.
1 sccm = 1 cm
using bypass tube included in Sensirion’s mass flow meter evaluation kit EK-F1
1 liter/min = 1000 sccm
1 bar = 100 000 Pa = 0.9869 atm = 401.9 inch H
Error = % of full scale (FS) or % of measured value, whichever is bigger.
Better calibration available for high volume OEM on request. Allow the Sensor to warm up for best results.
For higher overpressure resistance versions please check the EM1 product page.
For faster response times please check out the ASF1430 high speed mass flow meter data sheet
Parameter
Flow Sensor
Dynamic Range
Resolution
Lowest Detectable
Flow
Pressure Drop
Repeatability
Accuracy
Offset
Overpressure
Resistance
Response Time
Operating
Temperature
Ambient
Temperature
Coefficient
Position Sensitivity
Temperature
Sensor
Dynamic Range
Resolution
Accuracy
The sensor warms up by about 7°C (depending on supply voltage and ventilation).
Mass Flow Sensor Performance
(8)
3
/min at 0°C and 1013mbar pressure (1sccm = 0.001 norm liter)
(9)
Condition
direct measurement
using proposed bypass tube
customized bypass tube
400 sccm flow
< 10 sccm flow
< 10 sccm flow
400 sccm, p
23 C
23°C
depends on resolution setting
(see Section 3, Table 2)
Zero
Span
p
abs
=1 bar, small nitrogen flow
Measures temperature inside the sensor, but not of the surrounding air
5…100 % of full scale
0…5 % of full scale
abs.
= 1 bar
2
O = 14.5 psi
(23)
1
Version 2.1
Minimum
unlimited
-400
-100
142
0
0
3
0.0025 % FS
0.025 % m.v.
0.05 % FS
1 % m.v.
Typical
< 0.005
< 0.005
0.015
±0.008
< 0.08
0.09
0.01
120
0.1
2
(4)
(7)
(7)
(6)
unlimited
Maximu
< 0.02
1280
m
400
100
70
70
2
% measured value /
% FS / °C
liter/min
sccm
Units
% FS
sccm
sccm
% FS
sccm
(1010)
Pa
bar
ms
°C
°C
°C
°C
°C
(5)
(2)
(4)
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