D6F02A1110 Omron, D6F02A1110 Datasheet - Page 3

• Manufacturer Part Number: D6F02A1110
• Description: Flow Sensor Mass Air ±3% 3-Pin
• Manufacturer: Omron

Specifications of D6F02A1110

• Accuracy: ±3 %
• Medium: Air
• Maximum Output Voltage: 5 V
• Typical Operating Supply Voltage: 12|15|18|24 V
• Sensor Type: Mass
• Lead Free Status / Rohs Status: Compliant

Inside each D6F there is a highly sensitive MEMS flow chip that is only
1.55mm x 1.55mm x 0.4mm thick. The MEMS flow chip has two thermopiles
either side of a tiny heater element used to measure the deviations in heat
symmetry caused by the passing gas flow in either direction. A thin layer of
insulating film protects the sensor chip from exposure to the gas.
When there is no flow present, temperature distribution concentrated around
the heater is uniform and the differential voltage over the two thermopiles is
0V (Diagram 1).
When even the smallest flow is present, temperature on the side of the heater
facing the flow cools, and warms up on the other side of the heater - heat
symmetry collapses (Diagram 2).
The difference of temperature appears as a differential voltage between the 2
thermopiles - the flow velocity, direction and mass flow rate can be measured.
Gas/Air Flow
Flow measurement principle
Omron has been a leading manufacturer of MEMS
based components and modules for measurement
and control applications since 1990 and has
shipped more than 20 million products.
We concentrate on bulk micro-machining such as anodic
bonding, electro chemical etch (ECE), silicon processes
such as thin film deposition, wet and dry etching,
electrode formation & fine plastic replication and glass
wafer processes.
Lower thermopile (poly-Si, Al)
Upper thermopile (poly-Si, Al)
Electrode Pad
Cavity
Thermistor (poly-Si)
Heater (poly-Si)
Upstream thermopile
Base
Flow
FEM Simulation
Diagram 2 No flow conditionHeater
Upper side insulator film
Diagram 1 Flow condition
Under side insulator film
Heater
Flow
Downstream thermopile
Thermopile