EM1NV SENSIRION, EM1NV Datasheet - Page 6

Flow Sensor

EM1NV

Manufacturer Part Number
EM1NV
Description
Flow Sensor
Manufacturer
SENSIRION
Datasheet

Specifications of EM1NV

Pressure Max
116psi
Accuracy
± 3% At 1-100% Full Scale
Flow Range
0-200 Ln/min
Sensing Accuracy
5%
Output Type
RS 232/SPI
Supply Voltage Max
18VDC
Flow Rate Min
0l/min
Pressure Drop
0.029psi
Supply Voltage Min
7VDC
Sensor Output
RS-232/SPI
Rohs Compliant
Yes
Flow Rate Max
200l/min
Accuracy %
3%
Lead Free Status / RoHS Status
Lead free / RoHS Compliant
CMOSens
By default temperature updates are done automatically
every 60 seconds (INT=12000).
1.4 Gas Flow and Pressure Difference
The CMOSens
measurement. However, there is a well defined relation
between mass flow and pressure drop. This relation is
shown in Figure 4.
Figure 4: Differential Pressure vs. Mass Flow of
CMOSens
Table 5: Overview of Wetted Materials
1.5
The construction ensures that a minimum number of
materials is wetted by the gas which is measured by the
CMOSens
The following Table 5 gives an overview of the
materials wetted by the gas.
www.sensirion.com
Body
Sensor element
Sealing
Part
60
40
20
Wetted Materials & Compatibility
0
duration and accuracy of the temperature
update to the maximum.
0
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EM1 Mass Flow Meter for Gases
EM1 Device.
EM1 Mass Flow Meter.
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EM1 is calibrated for mass flow
50
Massflow (ln/min)
100
Silicon oxide (SiOx)
Silicon nitride (Si
Wetted Material
Polycarbonate
Silicon (Si)
Glob Top
Viton
Epoxy
Gold
150
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Data Sheet EM1 – v3.0 /March 2009
3
N
200
4
)
1.6
The CMOSens
different versions. For all versions the safety restrictions
in chapter 1.7 must be observed.
For standard applications a cost effective Nitrogen (N
calibrated off the shelf version is the best choice. This
also ensures short lead times at comparably low costs.
For the use of these devices with other gases, detailed
conversion functions are available. Please check also
www.sensirion.com for further details.
For volume customers other gas type calibrations are
available on request and availability. Please contact
Sensirion for further details if this option is applicable to
you.
1.7
The packaging method of the CMOSens
with the inert housing and the sealing materials ensure
a tight and highly resistant sealing of the device. Please
be aware that aggressive and corrosive gases can
influence the sensor element and may even destroy the
Viton
Please also be careful with the use of explosive or toxic
gases. Any leakage even outside the controller can be
dangerous. The CMOSens
according to EN 50020 chapter 6.2.4 b) for the safe use
of gases of class T4 or group 1 (as mixtures of air with
hydrogen or hydrocarbons).
For the above reasons, Sensirion guarantees the safe
use of the CMOSens
in-explosive and non-toxic gases only.
2
Figure 5: CMOSens
2.1 Electrical Connector
The electrical connector on the cover of the CMOSens
EM1 is a Molex PN 53014-0810 (straight header, male,
8Pin). You need a Molex PN 51004-0800 connector
housing (female, 8 Pin) with crimp contacts Molex PN
50011-8100 to connect the sensor. Please check the
Molex homepage for details (http://www.molex.com).
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Pins and Electrical Interfaces
sealing or the polycarbonate body.
Operation with different gas types
Safety Restrictions
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EM1 mass flow sensor is available in
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EM1 pin out.
EM1 Mass Flow Meter for inert,
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sensor element is tested
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chip together
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