MPX5010 MOTOROLA [Motorola, Inc], MPX5010 Datasheet

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MPX5010

Manufacturer Part Number
MPX5010
Description
INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 to 4.7 V OUTPUT
Manufacturer
MOTOROLA [Motorola, Inc]
Datasheet

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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
Features
1. T C = 25 C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 2
MAXIMUM RATINGS (1)
Overpressure (2) (P1 > P2)
Burst Pressure (2) (P1 > P2)
Storage Temperature
Operating Temperature
Motorola, Inc. 1997
Motorola Sensor Device Data
The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon
5.0% Maximum Error over 0 to 85 C
Ideally Suited for Microprocessor or Microcontroller–Based Systems
Patented Silicon Shear Stress Strain Gauge
Durable Epoxy Unibody Element
Temperature Compensated over
Figure 1. Fully Integrated Pressure Sensor Schematic
ELEMENT
SENSING
Parametrics
X–ducer
GND
2
COMPENSATION
TEMPERATURE
GAIN STAGE #1
THIN FILM
*
V S
AND
3
40 to +125 C
PINS 4, 5 AND 6 ARE NO CONNECTS
SHIFT CIRCUITRY
Symbol
GAIN STAGE #2
P burst
P max
REFERENCE
T stg
GROUND
T A
AND
– 40 to +125
– 40 to +125
Value
1
100
75
V out
Unit
kPa
kPa
C
C
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
1
2
3
0 to 10 kPa (0 to 1.45 psi)
CASE 867C–05, STYLE 1
MPX5010
PRESSURE SENSOR
CASE 867–08, STYLE 1
0.2 to 4.7 V OUTPUT
CARRIER ELEMENT
SERIES
V out
Gnd
INTEGRATED
DIFFERENTIAL
PIN NUMBER
PORT OPTION
V S
BASIC CHIP
Order this document
by MPX5010/D
4
5
6
N/C
N/C
N/C
1

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MPX5010 Summary of contents

Page 1

... On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metalliza- tion, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure ...

Page 2

... MPX5010 SERIES OPERATING CHARACTERISTICS ( 5.0 Vdc unless otherwise noted, P1 > P2) Characteristic Pressure Range (1) Supply Voltage (2) Supply Current Minimum Pressure Offset ( 5.0 Volts Full Scale Output ( 5.0 Volts Full Scale Span ( 5.0 Volts Accuracy (6) Sensitivity Response Time (7) Output Source Current at Full Scale Output Warm– ...

Page 3

... The MPX5010 series pressure sensor operating character- istics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long– ...

Page 4

... MPX5010 SERIES Transfer Function (MPX5010D) Nominal Transfer Value: V out = (0. 0.04) Nominal Transfer Value: (Pressure Error x Temp. Factor x 0. Nominal Transfer Value 5.0 V Temperature Error Band 4.0 3.0 Temperature 2.0 Error Factor 1.0 0.0 NOTE: The Temperature Multiplier is a linear response from 0 to –40 C and from 85 to 125 C. ...

Page 5

... MPX5010GVS MPX5010GSX MPX5010GVSX ORDERING INFORMATION The MPX5010 pressure sensor is available in differential and gauge configurations. Devices are available in the basic ele- ment package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connec- tions. D Device Type ...

Page 6

... MPX5010 SERIES –A– PIN 1 SEATING –T– PLANE PRESSURE –B– V PORT #2 VACUUM (P2 –T– 6 PACKAGE DIMENSIONS R POSITIVE PRESSURE (P1 0.136 (0.005 CASE 867–08 ISSUE N BASIC ELEMENT (D) ...

Page 7

... PRESSURE (P1) –Q– PIN 0.13 (0.005 CASE 867C–05 ISSUE F MPX5010 SERIES NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MILLIMETERS DIM MIN MAX MIN MAX A 1.145 1.175 29.08 29.85 B 0.685 0.715 17 ...

Page 8

... MPX5010 SERIES PACKAGE DIMENSIONS–CONTINUED –P– 0.25 (0.010 SEATING –T– PLANE PIN –B– V PORT #1 POSITIVE PRESSURE (P1 –T– PORT #2 L VACUUM (P2) V POSITIVE PRESSURE (P1) –Q– ...

Page 9

... CASE 867G–03 ISSUE D VACUUM SIDE PORTED (GVSX) MPX5010 SERIES NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. –Q– 2. CONTROLLING DIMENSION: INCH. INCHES MILLIMETERS DIM MIN MAX MIN MAX A 1.080 1.120 27.43 28.45 B 0.740 ...

Page 10

... MPX5010 SERIES Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “ ...

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