MPXAZ6115A MOTOROLA [Motorola, Inc], MPXAZ6115A Datasheet

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MPXAZ6115A

Manufacturer Part Number
MPXAZ6115A
Description
Media Resistant and High Temperature Accuracy Integrated Silicon Pressure Sensor
Manufacturer
MOTOROLA [Motorola, Inc]
Datasheet

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© Motorola, Inc. 2004
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Media Resistant and
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The sensor's packaging has been designed to provide
resistance to high humidity conditions as well as common automotive media. The
small form factor and high reliability of on-chip integration make the Motorola
pressure sensor a logical and economical choice for the system designer.
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
sensor chip.
Features
Application Examples
Motorola's MPXAZ6115A series sensor integrates on-chip, bipolar op amp
The MPXAZ6115A series piezoresistive transducer is a state-of-the-art,
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure
Resistant to High Humidity and Common Automotive Media
Improved Accuracy at High Temperature
1.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Temperature Compensated from -40° to +125°C
Durable Thermoplastic (PPS) Surface Mount Package
Aviation Altimeters
Industrial Controls
Engine Control/Manifold Absolute Pressure (MAP)
Weather Station and Weather Reporting Devices
SENSING
ELEMENT
Figure 1. Fully Integrated Pressure Sensor
GND
COMPENSATION
TEMPERATURE
GAIN STAGE #1
THIN FILM
PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS
V S
AND
Freescale Semiconductor, Inc.
Schematic
For More Information On This Product,
SHIFT CIRCUITRY
GAIN STAGE #2
REFERENCE
GROUND
Go to: www.freescale.com
AND
V out
NOTE:
SUPER SMALL OUTLINE PACKAGE
1
2
3
4
15 to 115 kPa (2.2 to 16.7 psi)
SMALL OUTLINE PACKAGE
MPXAZ6115A
MPXHZ6115A
0.2 to 4.8 Volts Output
Pins 1, 5, 6, 7, and 8 are internal
device connections. Do not
connect to external circuitry or
ground. Pin 1 is denoted by the
notch in the lead.
PRESSURE SENSOR
MPXAZ6115AC6U
Gnd
N/C
V
V
MPXAZ6115AC6U
MPXAZ6115A6U
out
MPXHZ6115A6U
SERIES
CASE 482A-01
CASE 1317A-03
S
CASE 1317-04
INTEGRATED
PIN NUMBER
CASE 482-01
Order Number: MPXAZ6115A
5
6
7
8
Rev. 1, 06/2004
N/C
N/C
N/C
N/C

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MPXAZ6115A Summary of contents

Page 1

... On-Chip Signal Conditioned, Temperature Compensated and Calibrated Motorola's MPXAZ6115A series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The sensor's packaging has been designed to provide resistance to high humidity conditions as well as common automotive media. The small form factor and high reliability of on-chip integration make the Motorola pressure sensor a logical and economical choice for the system designer ...

Page 2

... MPXAZ6115A MPXHZ6115A SERIES (1) MAXIMUM RATINGS Parametrics Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Output Source Current @ Full Scale Output Output Sink Current @ Minimum Pressure Offset NOTES: 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from V ...

Page 3

... Contact the factory for more information regarding media compatibility in your specific application. Go to: www.freescale.com MPXAZ6115A MPXHZ6115A SERIES +5 Pin 2 MPXAZ6115A V out Pin 4 GND Pin 3 ...

Page 4

... MPXAZ6115A MPXHZ6115A SERIES Transfer Function (MPXAZ6115A) Nominal Transfer Value out ± (Pressure Error x Temp. Factor x 0.009 5.0 ± 0.25 Vdc V S Temperature Error Band 4.0 3.0 Temperature 2.0 Error Factor 1.0 0.0 NOTE: The Temperature Multiplier is a linear response from 0°C to -40°C and from 85°C to 125°C Pressure Error Band 3 ...

Page 5

... TYP 0.150 3.81 0.027 TYP 8X 0.69 0.053 TYP 8X 1.35 Figure 6. SSOP Footprint (Case 1317 and 1317A) Go to: www.freescale.com MPXAZ6115A MPXHZ6115A SERIES 0.100 TYP 2.54 0.300 7.62 inch mm inch mm MPXAZ6115A 5 ...

Page 6

... MPXAZ6115A MPXHZ6115A SERIES - MPXAZ6115A 6 Freescale Semiconductor, Inc. SMALL OUTLINE PACKAGE DIMENSIONS 0.25 (0.010 PIN 1 IDENTIFIER M CASE 482-01 ISSUE 0.25 (0.010 PIN 1 IDENTIFIER ...

Page 7

... M GAGE PLANE 0.010 0.002 CASE 1317-04 ISSUE D Go to: www.freescale.com MPXAZ6115A MPXHZ6115A SERIES NOTES: 1. ALL DIMENSIONS ARE IN INCHES. 2. DIMENSIONING AND TOLERANCING PER ASME Y14.5M-1994. 3. DIMENSIONS DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED .006 INCHES PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5˚ MAXIMUM. ...

Page 8

... MPXAZ6115A MPXHZ6115A SERIES SUPER SMALL OUTLINE PACKAGE DIMENSIONS 2X 0.006 0.420 0.400 0.345 0.325 0.345 0.325 Ø 0.130 Ø 0.110 0.390 0.370 0.004 DETAIL E SEATING C PLANE MPXAZ6115A 8 Freescale Semiconductor, Inc. 0.050 0.025 0.025 0.018 8X 5 0.014 0.004 0.200 0.180 ...

Page 9

... Freescale Semiconductor, Inc. Motorola Sensor Device Data For More Information On This Product, NOTES Go to: www.freescale.com MPXAZ6115A MPXHZ6115A SERIES MPXAZ6115A 9 ...

Page 10

... MPXAZ6115A MPXHZ6115A SERIES MPXAZ6115A 10 Freescale Semiconductor, Inc. NOTES For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data ...

Page 11

... Freescale Semiconductor, Inc. Motorola Sensor Device Data For More Information On This Product, NOTES Go to: www.freescale.com MPXAZ6115A MPXHZ6115A SERIES MPXAZ6115A 11 ...

Page 12

... JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong For More Information On This Product, Go to: www.freescale.com 3-20-1 Minami-Azabu. Minato-ku, Tokyo 106-8573, Japan 81-3-3440-3569 852-26668334 HOME PAGE: http://motorola.com/semiconductors MPXAZ6115A ...

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