EM1-H0R0V-1N SENSIRION, EM1-H0R0V-1N Datasheet - Page 4

• Manufacturer Part Number: EM1-H0R0V-1N
• Description: MASS FLOW METER, FOR GASES
• Manufacturer: SENSIRION

Specifications of EM1-H0R0V-1N

• Svhc: No SVHC (15-Dec-2010)
• Air Flow Range: 0 - 0.05 L/min
• External Length / Height: 104mm
• External Width: 33.7mm
• Height: 43.6mm
• Length (imperial): 5.35"
• Output Configuration: RS232/SPI
• Output Type: RS232
• Pressure Max: 8bar
• Supply Voltage Range Dc: 7V To 18V
• Supply Voltage Dc Max: 18VDC
• Rohs Compliant: Yes
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

CMOSens
Table 2: Specifications of EM1 Mass Flow Meter – medium and high flow ranges.
All data unless otherwise noted apply for calibration conditions: 20°C, N2, 1013 mbar absolute pressure, horizontal mounting position, straight inlet fitting (length
min. 5 x ∅)
Table 3: Additional Specifications of EM1 Mass Flow Meter – all flow ranges.
1
2
3
4
5
6
7
8
www.sensirion.com
12.0 bar / 174 psi for short time operation, higher values for volume applications on request
Other ranges for volume applications on request
Including Offset, Non-Linearity, Hysteresis
Better accuracy available on request
In % of full scale (FS)
In % of measured value (m.v.) = of rate = of reading
Other gases for volume applications on request
All data for 1’013 mbar, 1 bar = 100 000 Pa = 401.9 inch H
Specification
Temperature Sensor (measured media)
Dynamic Range
Resolution
Accuracy
Electrical
Output
Supply Voltage
Electrical Connector
Mechanical
Length
Width
Height
Weight (straight / angle connector)
Mechanical Connector
Maximum Operating Pressure
Burst Pressure
Leak-Integrity
Material
Wetted Materials
RoHS / WEEE compliance
Specification
Range
Model Number
Flow Range
Performance
Accuracy
Repeatability
Offset
Standard Calibration Gas
Dynamic Range
Operating Temperature Ambient/Gas
Temp. Coeff. Zero
Temp. Coeff. Span
Position Sensitivity correction
Pressure Coefficient
Pressure Drop at Full Flow
2,3
®
EM1 Mass Flow Meter for Gases
1
6
7
8
1 - 100% FS
Condition
Condition
10-100% FS
straight inlet
<10% FS
<1 % FS
<5% FS
2
O = 14.5 psi. Lower pressure drop available for volume applications on request.
Data Sheet EM1 - v 2.6 / October 2006
Si, Si
3
N
4
4
, SiOx, Gold, Viton
EM1NR…
20 / 0.29
0 – 20
< 0.03
0.03
0.02
0.3
3
0.15% / bar – 0.01 % / psi
®
, Epoxy, Glob Top, Polycarbonate
0 – 50 / 32 – 122
0 – 60 / 32 – 140
RS 232 / SPI
13.6 / 5.35
+ 7 – + 18
1 x 10 e-4
>= 1:100
4.4 / 1.73
8.18 / 3.2
165 / 105
Value
40 / 580
Value
8 / 116
Molex
G 3/8
0.01
Yes.
0.1
0.1
Air
0.1
2
EM1NV…
100 / 1.45
0 – 200
< 0.03
0.05
0.02
0.5
5
% m.v. / °C
mbar l/s He
Unit
Unit
mbar / psi
%FS / °C
cm / inch
cm / inch
cm / inch
% m.v.
bar / psi
bar / psi
°C / °F
% m.v.
°C / °F
l
% FS
% FS
% FS
% FS
n
VDC
inch
/min
K
K
g
4 / 17
5