EM1-H0R0V-1N SENSIRION, EM1-H0R0V-1N Datasheet - Page 6

• Manufacturer Part Number: EM1-H0R0V-1N
• Description: MASS FLOW METER, FOR GASES
• Manufacturer: SENSIRION

Specifications of EM1-H0R0V-1N

• Svhc: No SVHC (15-Dec-2010)
• Air Flow Range: 0 - 0.05 L/min
• External Length / Height: 104mm
• External Width: 33.7mm
• Height: 43.6mm
• Length (imperial): 5.35"
• Output Configuration: RS232/SPI
• Output Type: RS232
• Pressure Max: 8bar
• Supply Voltage Range Dc: 7V To 18V
• Supply Voltage Dc Max: 18VDC
• Rohs Compliant: Yes
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

CMOSens
measurement. Since these interrupts of the flow
measurement
measurements are only done with a reduced accuracy.
They can vary between different measurements and
reduce the accuracy of the temperature compensated
flow output. The duration of the temperature update is
45 ms which gives a variation of the output of the
compensated flow by 0.1% of measured value (for N2).
Advanced users can choose duration and accuracy of
the temperature updates and reduce the inaccuracy of
the temperature compensation even more.
The moment of a temperature update can be controlled
in two modes:
By default temperature updates are done automatically
every 60 seconds (INT=12000).
1.4 Gas Flow and Pressure Difference
The CMOSens
measurement. However, there is a well defined relation
between mass flow and pressure drop. This relation is
shown in Figure 4.
Figure 4: Differential Pressure vs. Mass Flow of
CMOSens
www.sensirion.com
a) Automatically
b) By Hand
60
40
20
0
The temperature measurements are updated
automatically in fixed periods which can be set
by the command INT (see 0).
For highest accuracy it is recommended to set
INT=0 and initiate the updates through the
RS232 interface with UPDATETEMP (see 0).
For such measurements it also makes sense
to use the option for advanced users to set the
duration and accuracy of the temperature
update to the maximum.
0
®
®
EM1 Mass Flow Meter for Gases
EM1 Device.
®
shall
EM1 is calibrated for mass flow
50
Massflow (ln/min)
be
100
short
the
150
temperature
Data Sheet EM1 - v 2.6 / October 2006
200
1.5
The construction ensures that a minimum number of
materials is wetted by the gas which is measured by the
CMOSens
The following Table 5 gives an overview of the
materials wetted by the gas.
Table 5: Overview of Wetted Materials
1.6
The CMOSens
different versions. For all versions the safety restrictions
in chapter 1.7 must be observed.
For standard applications a cost effective Nitrogen (N
calibrated off the shelf version is the best choice. This
also ensures short lead times at comparably low costs.
For the use of these devices with other gases, detailed
conversion functions are available. Please check also
www.sensirion.com for further details.
For volume customers other gas type calibrations are
available on request and availability. Please contact
Sensirion for further details if this option is applicable to
you.
1.7
The packaging method of the CMOSens
with the inert housing and the sealing materials ensure
a tight and highly resistant sealing of the device. Please
be aware that aggressive and corrosive gases can
influence the sensor element and may even destroy the
Viton
Please also be careful with the use of explosive or toxic
gases. Any leakage even outside the controller can be
dangerous. The CMOSens
according to EN 50020 chapter 6.2.4 b) for the safe use
of gases of class T4 or group 1 (as mixtures of air with
hydrogen or hydrocarbons).
Body
Sensor element
Sealing
Part
®
sealing or the polycarbonate body.
Wetted Materials & Compatibility
Operation with different gas types
Safety Restrictions
®
EM1 Mass Flow Meter.
®
EM1 mass flow sensor is available in
®
sensor element is tested
Silicon oxide (SiOx)
Silicon nitride (Si
Wetted Material
Polycarbonate
Silicon (Si)
Glob Top
Epoxy
Viton
Gold
®
chip together
®
3
N
6 / 17
4
)
2
)