TSS463VAN Temic Semiconductors (acquired by ATMEL Corporation), TSS463VAN Datasheet - Page 4

• Manufacturer Part Number: TSS463VAN
• Description: Van Controller Serial Interface
• Manufacturer: Temic Semiconductors (acquired by ATMEL Corporation)

Qualpack TS80C31X2/C32X2
3. Technology Information
3.1 Wafer Process Technology
Process type (Name):
Base material:
Number of masks
Gate oxide
Polysilicon
Metal
Passivation
4
Wafer Thickness (final)
Wafer diameter
Material
Thickness
Number of layers
Thickness
Number of layers
Layer 1 material
Layer 1 thickness
Layer 2 thickness
Material
Thickness
Layer 2 material
CMOS (SCMOS1/2 - Z86E)
Silicon Epi substrate type
475um
150mm
13
Silicon dioxide
195 A
1
3000 A
2
TiN/W
600 + 5000 A
Ti/AlCu
7000 A
Si
10000 A
3
N
4
on SiO2
Rev. 2 – January 1999