SUV2001CIL PerkinElmer, SUV2001CIL Datasheet

SUV2001CIL

Manufacturer Part Number

SUV2001CIL

Description

Lamps Photolithography

Manufacturer

PerkinElmer

Datasheet

1.SUV2001CIL.pdf (2 pages)

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HSH2001CIEO

Lamps for Photolithography

Description

PerkinElmer Optoelectronics is a leading

manufacturer of mercury short arc lamps

ranging in output power from 1000 to

8000 watts. These lamps are used in the

production of printed circuit boards, liquid

crystal displays and semiconductors. The

HSH Series lamps are used worldwide in

microlithography systems manufactured

by ASML, Canon, GCA, Nikon, Karl

Suss, Ultratech Stepper, and SVG. With

extremely high stability, uniform output

distribution and extended lamp lifetimes,

the HSH Series has become the lamp

choice of many of the world’s leading

semiconductor manufacturers.

PerkinElmer has been a leading manufac-

turer of high intensity arc lamps for more

than 30 years and is a premier lamp sup-

plier for solid state lasers, medical equip-

ment, NASA space systems and

microlithography. PerkinElmer has

steadily advanced lamp performance from

1000 watts to 8000 watts. With the intro-

duction of new materials and proprietary

manufacturing processes, we have extend-

ed lamp lifetimes form several hundred

hours to more than two thousand hours.

The HSH Series provides longer lifetimes,

outstanding uniformity, and excellent

spectral quality which results in increased

throughput, reduced downtime and an

overall reduction in the cost of ownership.

Lighting

www.perkinelmer.com/opto

Mercury Short Arc Lamps

Imaging

Telecom

Applications

•

Microlithography

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SUV2001CIL Summary of contents

Page 1

... HSH Series has become the lamp choice of many of the world’s leading semiconductor manufacturers. PerkinElmer has been a leading manufac- turer of high intensity arc lamps for more than 30 years and is a premier lamp sup- plier for solid state lasers, medical equip- ment, NASA space systems and microlithography ...

Page 2

... Singapore 139947 Phone: +65 775 2022 Fax: +65 775 1008 www.perkinelmer.com/opto Specification 4.5 mm (max) 33.5 mm Dia and Cable 33.5 mm Dia and Cable 350 400 450 500 550 600 650 700 Wavelength (nm) 500 1000 1500 2000 Hours of Operation Canon FPA3000 (i4, i5, i5+, iW) SUV2001CIL HBO2001W/CIL . DS-186 Rev B 1101 750 ...

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